Alumina Thin film Coatings at Optimized Conditions using RF Magnetron Sputtering Process

Authors

Muralidhar Singh M, Madanapalle Institute of Technology & Science, Madanapalle, Andhra Pradesh, IndiaFollow
Harinandan Kumar, Department of Petroleum and Earth Sciences, University of Petroleum and Energy Studies, Bidholi, Via Prem Nagar, Dehradun, Uttarakhand 248007, IndiaFollow
P. Sivaiah, Madanapalle Institute of Technology & Science, Madanapalle, Andhra Pradesh, IndiaFollow

Abstract

This study deals with the extensive investigation of Alumina thin film coating deposited on glass, stainless steel, and polycarbonate substrates at 25oC. The transmittance, reflectance, and surface roughness were determined. Transmittance was observed from 88 to 91 % for alumina thin film coating on glass and polycarbonate substrates. The stiffness, hardness, and elastic modulus were 58, 52, and 47 μN/nm, 7.52, 7.14, 6.87, 103, 112, and 122 GPa thin-film coating on different substrates. An increase in surface roughness and transmittance was observed with sputtering power and the thickness of the coating.

Recommended Citation

Singh M, Muralidhar; Kumar, Harinandan; and Sivaiah, P. (2021) "Alumina Thin film Coatings at Optimized Conditions using RF Magnetron Sputtering Process," International Journal of Thin Film Science and Technology: Vol. 10 : Iss. 1 , PP -.
Available at: https://digitalcommons.aaru.edu.jo/ijtfst/vol10/iss1/3