This study deals with the extensive investigation of Alumina thin film coating deposited on glass, stainless steel, and polycarbonate substrates at 25oC. The transmittance, reflectance, and surface roughness were determined. Transmittance was observed from 88 to 91 % for alumina thin film coating on glass and polycarbonate substrates. The stiffness, hardness, and elastic modulus were 58, 52, and 47 μN/nm, 7.52, 7.14, 6.87, 103, 112, and 122 GPa thin-film coating on different substrates. An increase in surface roughness and transmittance was observed with sputtering power and the thickness of the coating.
Singh M, Muralidhar; Kumar, Harinandan; and Sivaiah, P.
"Alumina Thin film Coatings at Optimized Conditions using RF Magnetron Sputtering Process,"
International Journal of Thin Film Science and Technology: Vol. 10
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Available at: https://digitalcommons.aaru.edu.jo/ijtfst/vol10/iss1/3