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International Journal of Thin Film Science and Technology

International Journal of Thin Film Science and Technology

Abstract

Barium strontium Titanate (BST) is a solid solution consist of BaTiO3 and SrTiO3 that mixed with suitable ratio. Barium strontium Titanate oxide (Ba0.8Sr0.2TiO3) thin films prepared by sol gel technique. Barium strontium Titanate thin films deposited on Si substrate and annealing at 400,500, 600 and 700 oC. The characterization of BST film investigated by a different technique, the XRD and SEM revealed the phases, crystal structure and surface topography of the film. XRD pattern shows tetragonal phase for perovskite structure Ba0.8Sr0.2TiO3 with many peaks for different plans. The films annealed at the different temperature that indicated intermediate phases on perovskite structure of Ba0.8Sr0.2TiO3.

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