The objective of this research was to investigate the influence of spin coating process parameters on the thickness and surface roughness of Zinc oxide (ZnO) thin films using L9 Orthogonal Array. ZnO thin film was deposited on glass substrate at room temperature by sol-gel spin coating method. Spinning speed, spinning duration, volume of the solution and molar concentration of the precursor were studied as experimental factors. Molar concentration of the precursor significantly influenced both coating thickness and surface roughness. Combination of least coating thickness of 492 nm and best surface roughness of 3.27 nm was achieved at 5000 rpm spinning speed, 0.75 ml volume of the solution and 0.4 M Molar concentration of the precursor. But, the spinning duration was 30 seconds for the coating thickness of 492 nm and 60 seconds for surface roughness of 3.27 nm. Atomic Force Microscopy, X-ray diffraction and Scanning Electron Microscopy were used to analyze the surface morphology of the ZnO thin films.
B.W, Shivaraj; N Narasimha Murthy, H; Krishna, M; and C Sharma, S
"Investigation of Influence of Spin Coating Parameters on the Morphology of ZnO Thin Films by Taguchi Method,"
International Journal of Thin Film Science and Technology: Vol. 2
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Available at: https://digitalcommons.aaru.edu.jo/ijtfst/vol2/iss2/10