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International Journal of Thin Film Science and Technology

International Journal of Thin Film Science and Technology

Abstract

Copper oxynitride (CuOyNx) thin films were deposited on glass substrates by dc reactive magnetron sputtering at room temperature and a pressure of 5 x 10-3 mbar with varying oxygen and nitrogen concentrations concurrently on each film for 10 minutes. The oxygen concentration was increased from 2 sccm, 4 sccm, 6 sccm, 8 sccm and 10 sccm while that of nitrogen was reduced from 8 sccm, 6 sccm, 4 sccm, 2 sccm and 0 sccm. The copper oxynitride thin films formed were annealed at 200 0C and 300 0C and their optical properties measured. We observed that at oxygen to nitrogen ratio of 8:2, there is a pronounced shifted of transmittance peak of CuOyNx from 610 nm to 810 nm for As-deposited and those annealed at 300 0C. We concluded that CuOyNx has tunable optical properties.

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