Un-doped and fluorine-doped tin oxide (F:SnO2) films were prepared by spray pyrolysis technique on glass substrates. A systematic optimization of the solvent and the precursor as well as the preparation parameters and their effect on structural and physical (electrical/optical) characteristics are investigated. Although a single phase of tetragonal structure is obtained under all the preparation parameters, the type of crystallographic preferred orientation is mainly dependent on the solvent and the doping level. The crystallite size is in the range of 15-25 nm. The increase of spray time, substrate temperature and solution concentration results in an increase in the film thickness and a decrease in the sheet resistance. The average transmission has been found to change from 60 % to 90 % depending upon the variation of spray time and solution concentration. According to values of the figure of merit (ΦTC = 𝑇55010 / Rs), the optimum preparation parameters are: propanol as a solvent, spray time of 2 min, substrate temperature of 500 °C and solution concentration of 0.3 M. Considering these optimum preparation conditions fluorine-doped SnO2 was prepared and the highest figure of merit of value 8.5 × 10-3 Ω-1 is specified at 27 at. %.
M. Hashem, H.
"Performance of Transparent Conducting Fluorine-doped Tin Oxide Films for Applications in Energy Efficient Devices,"
International Journal of Thin Film Science and Technology: Vol. 5
, Article 9.
Available at: https://digitalcommons.aaru.edu.jo/ijtfst/vol5/iss1/9