Influence of Deposition Parameters on Optical Properties of Sputtered Tungsten Oxide Films

Authors

Christopher Mkirema Maghanga, Department of Biological & Physical Sciences, Kabarak University, P.O. Private Bag -20157 Kabarak, Kenya.Follow

Abstract

Thin films of tungsten oxide were deposited on glass substrates at different temperatures and O2/Ar ratios using DC Magnetron sputtering system. The samples were characterized using x-ray diffractometry and spectrophotometer structurally and optically respectively. Analysis of the results reveals dependence of structure on thickness and temperature. The O2/Ar ratio is also found to influence the optical properties appreciably for the entire wavelength range studied. Visual inspection of the films show that O2/Ar ratio influences the coloration of the film which varies from clear to dark blue for high to low O2/Ar ratios respectively.

Recommended Citation

Mkirema Maghanga, Christopher (2018) "Influence of Deposition Parameters on Optical Properties of Sputtered Tungsten Oxide Films," International Journal of Thin Film Science and Technology: Vol. 7 : Iss. 2 , PP -.
Available at: https://digitalcommons.aaru.edu.jo/ijtfst/vol7/iss2/2