Fabricate and Characterization of SrTiO3-based MIM capacitors

Authors

Hamed A. Gatea, Department of Medical Physics, Al-Mustaqbal University College 51001, Hillah, Babylon, IraqFollow
Mohammed Ayad Alkhafaji, Department of Medical Device, National University of Science and Technology, Dhi Qar, IraqFollow
Hashim Abbas, Department of Optics, College of Health and Medical Technology, Al-Ayen University, Thi-Qar, IraqFollow

Abstract

The conventional method uses the stoichiometric mixture of metallic oxides to synthesize polycrystalline SrTiO3. The SrTiO3 was prepared by spin coating to fabricate Metal-Insulator-Matel (MIM) aluminum-SrTiO3 film-aluminum. The cubic structure of the prepared thin film of SrTiO3 was confirmed by X-ray diffraction analysis. Strontium Titanate was deposited on silicon substrates. Studying the effect of the film thickness on the structural and electrical properties. The surface morphology of deposited thin films was studied using a scanning electron microscope. Electrical properties for SrTiO3 films at constant frequency were measured. The electrical conductivity decreases with increasing thickness. The behavior of (capacitance- Frequency) at different thicknesses was discussed. It is noted that the dielectric constant decreases with increasing frequency for all films, and the dielectric constant increases as thickness increases.

Recommended Citation

A. Gatea, Hamed; Ayad Alkhafaji, Mohammed; and Abbas, Hashim (2023) "Fabricate and Characterization of SrTiO3-based MIM capacitors," International Journal of Thin Film Science and Technology: Vol. 12 : Iss. 3 , PP -.
Available at: https://digitalcommons.aaru.edu.jo/ijtfst/vol12/iss3/2